A new approach combining atomic layer deposition and organic film etch process may solve critical challenges in the various processes in advanced nodes. We demonstrated a high selective and ...

Additive Manufacturing (AM) is a term used to identify the manufacturing processes performed by 3D printing through layer-by-layer construction. In addition to avoiding the generation of waste through ...

A pathway for ALD-enhanced materials to be quickly developed and transitioned from lab-scale to commercial production is available for almost any application, for the first time ever. Atomic-level ...